SEM: Zeiss Sigma FESEM
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System specifications
The Zeiss Sigma is a Scanning Electron Microscope (SEM) with Schottky Field Emission (FE) source and GEMINI electron optical column. The instrument has 3 detectors, i.e. an In-Lens Secondary Electron detector, lateral Secondary Electron (SE) Detector and 4-Quadrant Backscatter Electron (BSE) detector. Apertures range from 20 to 120micron and maximum accelerating Voltage is 30kV. The instrument includes a 5-axis (x, y, r, z, t) motorized rotary stage. Sample size as large as 20cm is allowed.
More information at http://www.zeiss.com/microscopy/en_de/home.html